Manufacture : Rudolph

Model : EL III (Ellipsometer)

Wafer Size :  200 mm

Serial Number : 7070

Wafer Size :  up to 4"

Date Manufactured :  09/89

Sub Systems : 1. Small Spot Optics
              2. Other Optics ( A 7899 & A 7917 )


Thickness and refractive index measurements of double layer transparent films.
Operating Principles : Null Seeking
Operating Wavelength : 632.8nm
Resolution & Accuracy : Polarizer or Analyzer _ 0.05━
                        DELTA _ 0.1━
                        PSI _ 0.05━
Angle of Incidence : Standard pin locations 70━‐0.02━ and 90━‐0.02━
                    Optional Pin Locations 60━ & 80━
Measuring Time : Typlical
                      Single Film : 15 seconds
                      Double Film : 20 seconds
Digital Output : Serial ASCII,RS-232 / RUDOLPH and SEMI Communication Standards.
Mounting Plane : 6￣ X 6￣ (15.2cm X 15.2cm) Horizontal with vacuum holddown.
Autocollimator / Microscope : Microscope magnification 9X. Field of view 15mm.
Thermal Printer : Built in. Dot-Matrix format. Alpha-numeric