Manufacturer: LAM Research
Model: Rainbow 4520
Serial: 3923
- 4"/100mm
- Envision software
- Through-the-wall
- Orbital Gas Box
- RF cart with PDW 2200 AE RF generator
- Dual Verity EP200Mmd Endpoint detection.
- Remote operator interface, circuit breaker style onboard AC dist.
- Dual channel LAM chiller included : LAM 2080 TCU
- 208V 3 phase 30A power.