Manufacture : Nanometrics
Model : NaoSpec/AFT 200
Model Number : 7001-0081
S/N : 0986-3096

Wafer Size : Up to 6"

Desc : Film Thickness Measurement System
Standard films measured silicon dioxide and nitride, 
negative and positive resists, nitrides, oxides, and polyimides

- Measures from 400A to 40,000A
- Measures in the 480-790 nm wavelength range 
- 10x eyepieces 
- M5x0.1,  M10x0.25, and M100x0.90 objectives
- Computer Controller : model: 7201-1045, s/n:0986-cs-2-2089
- printer (model: 20-03050)