Number of Films: Up to 3 layers
Wavelength Range: 400 to 800nm
Film Thickness Range: 100A to 50um
Signal Detector: Linear CCD Array
O/S: Windows 2000, XP
Repeatability: 2A(1sigma static repeatability)
Measurement Time: 1~2 sec
Obkect Lens/Spot Size:5X, 10X, 40X/40um, 20um, 5um
Wafer Size: up to 8"
Stage: Manual
Computer: Pentium-based