Manufacture : Tegal
Model : 915
Desc : Asher

-Photo resist Stripper/Descum Barrel
-Can Process up to  150 mm (6") wafers

-ACG-10 RF Generator
-Monitor & Keyboard

-Etch Rate: 100-400A/min.

-Dimensions: 24"w X 36"D X 34"H

-Power Requirement: 200-240 VAC, 30Amp, Single Phase

-Weight 400 LBS