Manufacture : KLA Tencor

Model : Alpha Step 200

Model Number : 084999

Wafer Size : Up to 6"

Power Code : 90-130V

S/N : 0590-1857

Desc : Step Profiler
 
- Routinely measures step heights and surface profiles below 200A

- A single button automatically initiates scanning, 
  leveling and display of scaled profile

- Measures up to 150mm wafers with 360 degree rotation

- Date is stored in computer memory

- Stylys force continously monitored and displayed

- Built-in thermal screen-image printer

- Vertical measurement ranges +/- 160kA or +/- 160um

- Horizontal measurements ranges up to 10,000um max

- Resolution : Vertical - 5mm +/- 160um (5A +/- 160kA)
               Horizontal - 400A

- Digital conversion rate : 50 samles / Sec

- Stylus Radius : 12.5um or 5 um (standard)

- Stylus tracking force : Adjustable 1~25mg

- Sample stage movement : X axis (4"), Y axis (3.2"), Z axis (0.9")