SJT Tech offers a comprehensive service to provide all customers in the semiconductor industry.

1. Representative

SJT Tech acquired distribution and service of Auto-control thickness measurement systems from K-MAC and Mask Aligner systems and Bench-top Spin Coater systems from MIDAS System Co.



Thickness Measurement System: ST2000-DLXn ST4000-DLX

Mask Aligner: MDA-6000 MDA-8000
Spin Coater: Spin-1200D


2. Equipment Refurbishment and Upgrade

SJT Tech is committed to provide quality surplus used equipment brokerage service, in terms of searching and buying used equipment in time and with economic cost in semiconductor industries.

SJT Tech provides refurbishment for Tegal Etchers, LAM Rainbow, AMAT P5000, Varian 3190/3290, DNS 60A, 80A, 80B, SVG tracks.

LAM Rainbow panel upgrade
Applied Materials panel upgrade
3. Repair Service : CKD Valves and Controllers

SJT Tech provides to repair CKD valve and its controllers with economic expences. Also, the turn around time is very reasonable.

 Repair Service CKD valves & contollers


4. Spare Parts Service

SJT Tech is devoted to providing spare parts for leading edge semiconductor manufacturing equipment such as Tegal, LAM, Gasonics, Novellus Concept System, AMAT, DNS, SVG, Fusion, UT Steppers, and other surplus spare parts as well.


5. Field Service

SJT Tech provides field service for DNS 60A, 80A, 80B, SVG Tracks, TEGAL 901e, 903e, 915, 965, LAM 490, 590, 690, 4400, 4420, 4500, 4520, 9400, 9600, Novellus Concept One, Concept Two, Varian Sputter 3180/3190/3290.


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6. Preowned Equipment

SJT Tech offers comprehensive service to provide confidence for both sellers and buyers. View our list of equipment below:


Etching: Masking: Diffusion/Thin Film: Wet Process: Metrology/Inspect: Back-end Tool: RF Generator: Chiller: Other/Fab Supply:

Etching
No.
Manufacturer
 Description
Model
S/N
Comment
Pic
Spec
E107
Fusion
UV Stablizer
Fusion 150PC
N/A
6"
Yes
E112
Lam Research
Oxide Etcher
Auto-etcher 590
9070
4"
Yes
E126
Lam Research
Oxide Etcher
Rainbow 4520
3923
4"
Yes
E106
Tegal
Asher
Tegal 915
087
6"
Yes
E103
Tegal
Oxide Etcher
Tegal 903e
N/A
6"
Yes
E104
Tegal
Poly/Nitride Etcher
Tegal 901e
4"
Yes


Masking
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
M201
Codonics
Printer
VP-95 II
N/A
For Nikon Stepper
M210
DNS
DNS 60A
SKW-60A-AVP
91700-6210
1 Coat & 1 Developer
Yes
M211
DNS
Transformer
for 60A, 80A/B, working condition
M214
DNS
Temp & Humidity Controller
60A, 80A
M722
Now Technologies
400ml Resist Reservoir w/ level monitor
Used
M208
Semix
SOG
TR6132U
691148
4"
Yes
M720
Milipore
Controller
WCDS
Used


Diffusion/Thin Film
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
D303
Omega
X-Y Recorder
595
221059
For Implant Tool
D728
TEL
Furnace Remote Control Pad
GP230-LG II-HT
Handy Communication Terminal,DC24V/12W
D304
Varian
Turbo-V70LP Valve
V70LP/MKS
N/A
P/N: 415591-C1
D721
MKS
Controller
250B
used
D723
SGL Carborn
susceptor, 6" for Epi
N/A
N/A


Wet Process
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
F403
Modutek
Wafer Cleaning Sink w/ Dump Rinser
Chemical Bath Size:10"X10"X10" Sink Size:37"X24"X72"H
F402
Semitool
Single Rinse/Dryer w/ TC20, 328 controller
ST260D
C8249
Yes
F405
Semitool
Solvent Cleaner
WST 406 MG
44671/5165
4", with chemcial cabinet
Yes


Metrology and Inspection
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
S501
AG Associate
Heat Pulse
210/M
F82016
4" Operational
Yes
S503
KLA/Tencor
Alpha Step 200
AS-200
0590-1857
Up to 6"
Yes
S504
Nanometrics
Thickness measurement
010-0180
1280-0924
SOLD
Yes
S508
Nanometrics
Nanospec 200 Thickness Measurement
AFT 200
6"
Yes
S506
Rudolph
Ellipsometer
EL III 2C & 5C
7796
6"
Yes


RF Generator
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
R746
ENI
Controllable ENI RF Generator
AP 400B
105


Chiller
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
C738
Accurate Gas Control
Temperature controller for Tegal
354C
3290
Used
C735
Neslab
Merlin M33
100241029
SOLD
C736
Neslab
CFT75
199216018
Used
C737
Neslab
Chiller
FTC-350
115V/60Hz,R134A
C734
VWR System
1170
414555
Used
C739
Poly Science
Chiller
1496E
Used
C706
Tegal Chiller
Used


Other Fab Supply
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
F701
EMPAK
Mask Holder for MPA
B80-60-01A
12ea,6" used one for B80-60P-12
F745
Entegris
Mask Holder
H92-6025PL
F716
Entegris
6" Mask Holder, 250 Thk Bayon
H92-6025-108-5413
Brand New
F717
Fluoroware
Mask Holder
H92-6001PW
20 ea, Brand new
F718
Fluoroware
Teflon Cassettes, 6"
A182-60MB
SOLD
F719
Fluoroware
Teflon Cassettes, 6"
A194-60MB
Used
F712
H-Square
Wafer Transfer
WT6H
6", Used, 3ea
F731
H-Square
4" Metal Cassetts
MC-4-P or MC-4
F732
H-Square
6" Metal Cassetts
SQ22766-X
New 1qty
F733
H-Square
6" Metal Cassetts
285-8HC
Used 2qty
F744
H Square
Metal Cassette
R-E
4"
25qty
F713
Instruments
Chart Recorder
156
F0045
F711
Sony Video
Graphic Printer
UP-850
F729
Terra Universial
Vibration Isolation Table
57"Lx30"Wx31"H

as of 5/2/2010



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