Manufacture : Tegal
Model : 901e
Equipment Description : Nitride/poly Etcher

Wafer Size : 6"

Operational Manuals, electronics Schematics & Spare Parts Drawing included

Sub Systems : 

1. RF Generator (ACG 10)
2. Monitor / Keyboard (VT420)
3. Temp. Controller (1 ea)

Spec :

-Main system ; 44"w x 42"D x 26"H
               500 lbs
               208 VAC, 30 AMmp, 1 phase 

-RF Generator; 20"w x 16"D x 10"H
               104 lbs
               208 VAC

-CRT & Keyboard

-Temp. Controller ; 24"W x 20"D x 30"H
                    300 lbs
                    208 VAC, 1 phase

-Gas ; Gas1,2,3,4 & Clean O2