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Etching: Masking: Diffusion/Thin Film: Wet Process: Metrology/Inspect: Back-end Tool: RF Generator: Chiller: Other/Fab Supply:


Etching
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
E107
Fusion
UV Stablizer
Fusion 150PC
N/A
6"
E112
Lam Research
Oxide Etcher
Auto-etcher 590
9070
4"
E126
Lam Research
Oxide Etcher
Rainbow 4520
3923
4"
E106
Tegal
Asher
Tegal 915
087
6"
E103
Tegal
Oxide Etcher
Tegal 903e
N/A
6"
E104
Tegal
Poly/Nitride Etcher
Tegal 901e
4"


Masking
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
M201
Codonics
Printer
VP-95 II
N/A
For Nikon Stepper
M210
DNS
DNS 60A
SKW-60A-AVP
91700-6210
1 Coat & 1 Developer
M211
DNS
Transformer
for 60A, 80A/B, working condition
M214
DNS
Temp & Humidity Controller
60A, 80A
M722
Now Technologies
400ml Resist Reservoir w/ level monitor
Used
M208
Semix
SOG
TR6132U
691148
4"
M720
Milipore
Controller
WCDS
Used


Diffusion/Thin Film
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
D303
Omega
X-Y Recorder
595
221059
For Implant Tool
D728
TEL
Furnace Remote Control Pad
GP230-LG II-HT
Handy Communication Terminal,DC24V/12W
D304
Varian
Turbo-V70LP Valve
V70LP/MKS
N/A
P/N: 415591-C1
D721
MKS
Controller
250B
used
D723
SGL Carborn
susceptor, 6" for Epi
N/A
N/A


Wet Process
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
F403
Modutek
Wafer Cleaning Sink w/ Dump Rinser
Chemical Bath Size: 10"X10"X10" Sink Size: 37"X24"X72"H
F402
Semitool
Single Rinse/Dryer w/ TC20, 328 controller
ST260D
C8249
F405
Semitool
Solvent Cleaner
WST 406 MG
44671/5165
4", with chemcial cabinet


Metrology and Inspection
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
S501
AG Associate
Heat Pulse
210/M
F82016
4" Operational
S503
KLA/Tencor
Alpha Step 200
AS-200
0590-1857
Up to 6"
S504
Nanometrics
Thickness measurement
010-0180
1280-0924
SOLD
S508
Nanometrics
Nanospec 200 Thickness Measurement
AFT 200
6"
S506
Rudolph
Ellipsometer
EL III 2C & 5C
7796
6"
RF Generator
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
R746
ENI
Controllable ENI RF Generator
AP 400B
105


Chiller
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
C738
Accurate Gas Control
Temperature controller for Tegal
354C
3290
Used
C735
Neslab
Merlin M33
100241029
SOLD
C736
Neslab
CFT75
199216018
Used
C737
Neslab
Chiller
FTC-350
115V/60Hz,R134A
C734
VWR System
1170
414555
Used
C739
Poly Science
Chiller
1496E
Used
C706
Tegal Chiller
Used


Other Fab Supply
No.
Manufacturer
Description
Model
S/N
Comment
Pic
Spec
F701
EMPAK
Mask Holder for MPA
B80-60-01A
12ea,6" used one for B80-60P-12
F745
Entegris
Mask Holder
H92-6025PL
F716
Entegris
6" Mask Holder, 250 Thk Bayon
H92-6025-108-5413
Brand New
F717
Fluoroware
Mask Holder
H92-6001PW
20 ea, Brand new
F718
Fluoroware
Teflon Cassettes, 6"
A182-60MB
SOLD
F719
Fluoroware
Teflon Cassettes, 6"
A194-60MB
Used
F712
H-Square
Wafer Transfer
WT6H
6", Used, 3ea
F731
H-Square
4" Metal Cassetts
MC-4-P or MC-4
F732
H-Square
6" Metal Cassetts
SQ22766-X
New 1qty
F733
H-Square
6" Metal Cassetts
285-8HC
Used 2qty
F744
H Square
Metal Cassette
R-E
4"
25qty
F713
Instruments
Chart Recorder
156
F0045
F711
Sony Video
Graphic Printer
UP-850
F729
Terra Universial
Vibration Isolation Table
57"Lx30"Wx31"H

as of 5/2/2010



1. Used equipment

Buyers:
Didn't find your specific piece of equipment? Then fill out the equipment wanted form.

Sellers:
If you are a seller and you have equipment for sale, fill out the sell equipment form. 2. Refurbishment

We refurbish AMAT P-5000, LAM Auto-Etcher and Rainbow, TEGAL Etchers, Branson IPC, Fusion, DNS, SVG Tracks, TEL Tracks, MTI, Semix/TOK SOG, Eaton Implant, and others: sales@sjttech.com




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