Manufacture : SemiTool

Manufacture YR. : Dec. 2000

Model : WST406MG

Desc : Solvent Processor 

Wafter Size : 4 inch

Sub Sys : With Chemical Cabinet s/n :5165

Spec : 

-Semitool graphic controller display screens
-chemical cabinet (2 tanks, 1 for redian PRS1000, 1 for fresh PRS1000)
                  (Automatic drain system)
-Front loading with On-Axis Spin
-100-150mm wafter configurable (current : 4")