Manufacture : Tegal
Model : 915
Desc : Asher
-Photo resist Stripper/Descum Barrel
-Can Process up to 150 mm (6") wafers
-ACG-10 RF Generator
-Monitor & Keyboard
-Etch Rate: 100-400A/min.
-Dimensions: 24"w X 36"D X 34"H
-Power Requirement: 200-240 VAC, 30Amp, Single Phase
-Weight 400 LBS