Manufacture : Tegal
Model : 903e
Application : Oxide

Serial Number : 

Wafer Size : 6"

Operational Manuals, electronics Schematics & Spare Parts Drawing included

Spec :

-Main system ; 44"W x 42"D x 26"H
               500 lbs , 208 VAC, 30 Amp, 1 phase 
-RF Generator  CGA 10
-Pump (D30AC)
-Terminal Monitor / Keyboard
-Temp. Contorller (2 ea)