Manufacture : AG Association
Model : Heatpulse AG210M
Wafer Size : 4"
S/N : F82016

Annealing Chamber : 10.5" X 19"
Weight : 70 lbs
200-240 VAC, Single Phase, 6 OHz, 100 A Max
Cooling Water : 2 GPM, 60 psi   3/4" Female Hose
Purge Gas : 1/8" Barb