Manufacture : Semix
Model : TR6132U
Desc : Spin On Glass(SOG) coater 

Wafter Size : 4 inch

S/N : 

Sub-Systems : N/A

Status : Operational

Spec : 

Dimensions : 1985W x 750D x 1120H (Unit : mm)

Weight : 450 kg

Power : 200 Vac, 1 Phase, 18 A
Dry Air : PS 1/4" female, 4-7 kg /cm2, 250 Nl/m
Cooling Water : 20 A Vp          1kg/cm2       10l/min
DI water : 20 A VP            2 kg/cm2       15l/min

Temperature Control range : 40-70 degrees C  
Nozzle : Flat-Type (PVC MVP-9010), Cone-Type EX-424

Rinsing Time : 100 - 300 sec
Constant Temperature Reservoir : 10l max. 40-70 degrees C.