Stage Size 200mm x 200mm(8"), 300mm x 300mm(12") 
 
Measurement Range 100¡Ê~ 35§­(Depends on Film Type) 
 
Spot size 40§­/20§­, 4§­(option) 
 
Measurement Speed 1~2 sec./site 
 
Application Areas All Capability of ST2000 & More Precision Measurement 
Intended for Wafer Measurement & OELD 
 
Option Programmable Auto Z Stage
Reference Sample(K-MAC or KRISS or NIST)
CCD Camera
Transmittance Module 
 
Focus Coaxial Coarse and Fine Focus Controls 
 
Incident illumination 12v 100W Halogen Lamp