4. Equipment Refurbishment and Upgrade

SJT Tech is committed to provide quality surplus used equipment brokerage service, in terms of searching and buying used equipment in time and with economic cost in semiconductor industries.

SJT Tech provides refurbishment for Tegal Etchers, LAM Autoetcher, LAM Rainbow, AMAT P5000, Gasonic Aura 1000, DNS 60A, 80A, 80B, TEL ACT8, SVG 8xxx tracks.

5. Pre-owned Equipment

SJT Tech offers comprehensive service to provide confidence for both sellers and buyers. View our pre-owned list of equipment below:

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Etching: Masking: Diffusion/Thin Film: Wet Process: Metrology/Inspect: Back-end Tool: RF Generator: Chiller: Other/Fab Supply:

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Etching

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
E107	Fusion	UV Stablizer	Fusion 150PC	N/A	6"		Yes
E112	Lam Research	Oxide Etcher	Auto-etcher 590	9070	SOLD		Yes
E126	Lam Research	Oxide Etcher	Rainbow 4520	3923	SOLD		Yes
E106	Tegal	Asher	Tegal 915	087	SOLD		Yes
E103	Tegal	Oxide Etcher	Tegal 903e	N/A	6"		Yes
E104	Tegal	Poly/Nitride Etcher	Tegal 901e		4"		Yes

Masking

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
M201	Codonics	Printer	VP-95 II	N/A	For Nikon Stepper
M210	DNS	DNS 629	SSW-629-B	90700-8472	4 Scrubber unit		Yes
M211	DNS	Transformer			for 60A, 80A/B, working condition
M214	DNS	Temp & Humidity Controller	60A, 80A
M722	Now Technologies	400ml Resist Reservoir w/ level monitor			Used
M208	Semix	SOG	TR6132U	691148	4"		Yes
M215	SVG	SVG Track w/OAI exposure	1 Coater / 1 Developer	86 series	4"- 6", operational

Diffusion/Thin Film

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
D303	Omega	X-Y Recorder	595	221059	For Implant Tool
D728	TEL	Furnace Remote Control Pad	GP230-LG II-HT		Handy Communication Terminal,DC24V/12W
D304	Kokusai	Furnace, oxide	DD-813V	N/A
D305	TEL	Furnace, poly	Alpha-805CN		used
D723	SGL Carborn	susceptor, 6" for Epi		N/A	N/A

Wet Process

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
F403	Modutek	Wafer Cleaning Sink w/ Dump Rinser			Chemical Bath Size:10"X10"X10" Sink Size:37"X24"X72"H
F402	Semitool	Single Rinse/Dryer w/ TC20, 328 controller	ST260D	C8249			Yes
F405	Semitool	Solvent Cleaner	WST 406 MG	44671/5165	4", with chemcial cabinet		Yes

Metrology and Inspection

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
S501	AG Associate	Heat Pulse	210/M	F82016	4" Operational		Yes
S503	KLA/Tencor	Alpha Step 200	AS-200	0590-1857	SOLD		Yes
S504	Nanometrics	Thickness measurement	010-0180	1280-0924	SOLD		Yes
S508	Nanometrics	Nanospec 200 Thickness Measurement	AFT 200		6"		Yes
S506	Rudolph	Ellipsometer	EL III 2C & 5C	7796	SOLD		Yes

RF Generator

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
R746	ENI	Controllable ENI RF Generator	AP 400B	105	operational

Chiller

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
C738	Accurate Gas Control	Temperature controller for Tegal	354C	3290	Used
C735	Neslab	Chiller	EN 350
C736	Neslab	Chiller	RIE 111	101115012	Used
C737	Neslab	Chiller	FTC-350		115V/60Hz,R134A
C734	VWR System		1170	414555	Used
C739	Poly Science	Chiller	1496E		Used
C706	Tegal Chiller				Used

Other Fab Supply

No.	Manufacturer	Description	Model	S/N	Comment	Pic	Spec
F701	EMPAK	Mask Holder for MPA	B80-60-01A		12ea,6" used one for B80-60P-12
F745	Entegris	Mask Holder	H92-6025PL
F716	Entegris	6" Mask Holder, 250 Thk Bayon	H92-6025-108-5413		Brand New
F717	Fluoroware	Mask Holder	H92-6001PW		20 ea, Brand new
F718	Fluoroware	Teflon Cassettes, 6"	A182-60MB		SOLD
F719	Fluoroware	Teflon Cassettes, 6"	A194-60MB		Used
F712	H-Square	Wafer Transfer	WT6H		6", Used, 3ea
F731	H-Square	4" Metal Cassetts	MC-4-P or MC-4
F732	H-Square	6" Metal Cassetts	SQ22766-X		New 1qty
F733	H-Square	6" Metal Cassetts	285-8HC		Used 2qty
F744	H Square	Metal Cassette	R-E	4"	25qty
F713	Instruments	Chart Recorder	156	F0045
F711	Sony Video	Graphic Printer	UP-850
F729	Terra Universial	Vibration Isolation Table			57"Lx30"Wx31"H

as of 1/12/2012

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